Wafer Map Viewer

Wafer thickness/RI uniformity maps (2D/3D/radial/line). 웨이퍼 두께·RI 균일도 맵. Offline: data never leaves this computer.

Wafer Map Viewer turns wafer metrology files into clear uniformity maps — fully offline. Features • Reads CSV, TSV, TXT and Excel (XLSX) files, including multi-wafer and multi-block tool reports • Auto-detects X/Y, polar (R/θ) or site-number coordinates, units (mm/cm) and header rows • 2D contour maps, 3D surface maps with notch marker, radial and line profiles • Statistics per wafer: Mean, Range, NU% (3σ / Mean or other bases), edge exclusion, outlier flags • Blank values filled from nearby points and clearly marked as not measured • Colour range: common, auto per map, manual per map, or Mean ± X% • Multi-step comparison (e.g. As-dep → Conversion → Cure → Anneal) with Δ maps, trend charts and a CSV stats table • Export PNG images and CSV tables; save a single map without colour bar; save settings presets • View area (e.g. centre 200 mm), pumping port marker, sortable statistics tables • Built-in offline user guide • Interface in Korean, English, Japanese, Traditional Chinese and Simplified Chinese